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The semiconductor industry has developed significantly through continuous growth in the past. With advances in science and technology, the semiconductor industry required a high degree of flexibility and innovation to continuously respond to the rapid pace of change.
However, even in the complex and sophisticated semiconductor process due to improved technology, the problem of defects was unavoidable.
In particular, the defect detection of wafers, which draws semiconductor integrated circuits, is one of the major challenges faced by semiconductor manufacturing companies.
Deep learning has shown excellent performance through various studies, but because it learns based on data, its performance varies greatly depending on the quality of the data.
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IEEE/ICACT20220181 Slide.04
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