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IEEE/ICACT20210161 Slide.06        [Big Slide]	Oral Presentation
	Next, is the theory on silicon-on-insulator rib waveguide. To the greatest extent, silicon waveguides based on SOI platform can be easily built from SOI wafers as shown in Figure 1 by employing complementary metal-oxide semiconductor (CMOS) processes. So Figure 1 show the SOI wafers. If you see we got the outer ultra-thin silicone layer, buried oxide layer and the base silicone layer. Standard SOI wafers are made up of a layer of buried oxide (BOX) centrally located in between an ultra-thin top silicon layer and base silicon layer. The techniques used to design silicon-based type waveguides are optical lithography and etching process.

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