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IEEE/ICACT20250028 Slide.07
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Standardized protocols are essential for seamless communication between semiconductor equipment and host systems. SEMI, a global organization with over 2,000 member companies, defines the SECS/GEM standard to facilitate such communication. The SECS/GEM standard systematically standardizes equipment control and data collection, serving as a key component in enabling automation and smart factory implementation in semiconductor manufacturing processes. | |
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