IEEE/ICACT20250028 Slide.08        [Big Slide]       Oral Presentation
The core components of smart factories and factory automation are manufacturing equipment, the Equipment Interface Server (EIS), and the Manufacturing Execution System (MES). Manufacturing equipment includes Programmable Logic Controllers (PLCs), which communicate with the Equipment Interface Server (EIS) to transmit and receive data. However, traditional interface methods are often inefficient, requiring additional controllers to ensure smooth communication and efficient equipment control. While the introduction of these additional controllers increases initial costs, they play a crucial role in enhancing equipment control capabilities and supporting the SECS/GEM standard. As a result, they enable more precise process management and data exchange, ultimately contributing to the optimization of semiconductor manufacturing processes and the implementation of smart factories.

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