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Virual Oral Question and Answer
IEEE/ICACT20240058 Question.7
Questioner: jh.deng@saturn.yzu.edu.tw    2024-02-02 오전 1:06:58 		IEEE/ICACT20240058 Answer.7
Answer by Auhor mingannchung@ntut.edu.tw   2024-02-02 오전 1:06:58
In slides 8 and 10, the authors show simulated dimensions for the metal layer and actual fabricated products. After comparing, I would like to ask about the height difference, if any, between the orange and yellow sections in the schematic diagram on slide 8 when viewed from the side. On the eighth slide, the yellow color represents Metal 6. The height of Metal 6 is 10.14μm, and its thickness is 2.34μm. The orange color surrounding the antenna is Metal 1, which serves as the ground layer. The orange on both sides represents the density dummy required for the process, with a total height of 9.39μm.

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